The Science and Engineering of Microelectronic Fabrication
Material type:
TextPublication details: [S.l.] : Oxford University Press, 2001.Edition: 2nd edDescription: 624 pISBN: - 0195136055 (hardcover)
- 9780195136050 (hardcover)
| Cover image | Item type | Current library | Home library | Collection | Shelving location | Call number | Materials specified | Vol info | URL | Copy number | Status | Notes | Date due | Barcode | Item holds | Item hold queue priority | Course reserves | |
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Books
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Seminar Library, Mechanical Engg. | 621.38152CAM (Browse shelf(Opens below)) | Available | 40042 |
Total holds: 0
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