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The Science and Engineering of Microelectronic Fabrication

Campbell, Stephen A.

The Science and Engineering of Microelectronic Fabrication - 2nd ed. - [S.l.] : Oxford University Press, 2001. - 624 p. ;

ISBN: 0195136055 (hardcover) 9780195136050 (hardcover)

Subjects--Topical Terms:
Semiconductors--Design and construction
Microelectronics
Computer engineering

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