Fundamentals of Microfabrication and Nanotechnology: Vol 3 from Mems to bio-mems and bio-mems (Record no. 68988)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00493nam a22001697a 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781420055141 |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Madou, Marc J. |
| 245 ## - TITLE STATEMENT | |
| Title | Fundamentals of Microfabrication and Nanotechnology: Vol 3 from Mems to bio-mems and bio-mems |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 3rd edition |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | London: |
| Name of publisher | CRC, |
| Year of publication | 2012. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 654p. ; |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microelectromechanical systems |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Nanoelectromechanical systems |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microfluidics |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Solid state physics |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
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