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Fundamentals of Microfabrication and Nanotechnology: Vol 3 from Mems to bio-mems and bio-mems

Madou, Marc J.

Fundamentals of Microfabrication and Nanotechnology: Vol 3 from Mems to bio-mems and bio-mems - 3rd edition - London: CRC, 2012. - 654p. ;

ISBN: 9781420055141

Subjects--Topical Terms:
Microelectromechanical systems
Nanoelectromechanical systems
Microfluidics
Solid state physics

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