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Fundamentals of Microfabrication and Nanotechnology: Vol 2 manufacturing techniques for microfabrication and nanotechnology

Madou, Marc J.

Fundamentals of Microfabrication and Nanotechnology: Vol 2 manufacturing techniques for microfabrication and nanotechnology - 3rd ed. - London: CRC Press, 2012. - 656p. ;

ISBN: 9781420055141

Subjects--Topical Terms:
Microelectromechanical systems
Nanoelectromechanical systems
Microfluidics
Solid state physics

Dewey Class. No.: 670MAD

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