Process Technology for Silicon Carbide Devices
Zetterling, Carl-Mikael
Process Technology for Silicon Carbide Devices - London: INSPEC, 2002. - 76p. ;
0852969988
Silicon carbide--Electric properties
Carbides
Micromechanics
Ohmic contacts
Power semiconductors
Semiconductors
Semiconductors--Junctions
Silicon compounds
621.3815MIK
Process Technology for Silicon Carbide Devices - London: INSPEC, 2002. - 76p. ;
0852969988
Silicon carbide--Electric properties
Carbides
Micromechanics
Ohmic contacts
Power semiconductors
Semiconductors
Semiconductors--Junctions
Silicon compounds
621.3815MIK