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Microlithography : process technology for Ic fabrication

Elliott, David J.

Microlithography : process technology for Ic fabrication - [S.l.] : Mcgraw-Hill (Tx), 1986. - 378 p. ;

ISBN: 0070193045 (hardcover) 9780070193048 (hardcover)

Subjects--Topical Terms:
Integrated circuits--Very large scale integration--Design and construction
Microlithography
Photoresists

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