| 000 | 00493nam a22001697a 4500 | ||
|---|---|---|---|
| 999 |
_c68988 _d68985 |
||
| 020 | _a9781420055141 | ||
| 100 | _aMadou, Marc J. | ||
| 245 | _aFundamentals of Microfabrication and Nanotechnology: Vol 3 from Mems to bio-mems and bio-mems | ||
| 250 | _a3rd edition | ||
| 260 |
_aLondon: _bCRC, _c2012. |
||
| 300 | _a654p. ; | ||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aNanoelectromechanical systems | ||
| 650 | _aMicrofluidics | ||
| 650 | _aSolid state physics | ||
| 942 | _cBK | ||