| 000 | 00755nam a22002417a 4500 | ||
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| 999 |
_c68987 _d68984 |
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| 003 | PK-NaQUE | ||
| 005 | 20251120113315.0 | ||
| 008 | 251120b ||||| |||| 00| 0 eng d | ||
| 020 | _a9781420055141 | ||
| 040 | _cQUEST | ||
| 082 | _a670MAD | ||
| 100 | _aMadou, Marc J. | ||
| 245 | _aFundamentals of Microfabrication and Nanotechnology: Vol 2 manufacturing techniques for microfabrication and nanotechnology | ||
| 250 | _a3rd ed. | ||
| 260 |
_aLondon: _bCRC Press, _c2012. |
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| 300 | _a656p. ; | ||
| 650 | _aMicroelectromechanical systems | ||
| 650 | _aNanoelectromechanical systems | ||
| 650 | _aMicrofluidics | ||
| 650 | _aSolid state physics | ||
| 856 |
_uhttp://10.10.170.122:8080/browse/book/28925 _yDownload eBook |
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| 942 |
_cBK _2ddc |
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