| 000 | 00785nam a22002777a 4500 | ||
|---|---|---|---|
| 999 |
_c66638 _d66635 |
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| 003 | PK-NaQUE | ||
| 005 | 20241029091127.0 | ||
| 008 | 241029b ||||| |||| 00| 0 eng d | ||
| 020 | _a0852969988 | ||
| 040 | _cQUEST | ||
| 082 | _a621.3815MIK | ||
| 100 | _aZetterling, Carl-Mikael | ||
| 245 | _aProcess Technology for Silicon Carbide Devices | ||
| 260 |
_aLondon: _bINSPEC, _c2002. |
||
| 300 | _a76p. ; | ||
| 650 | _aSilicon carbide--Electric properties | ||
| 650 | _aCarbides | ||
| 650 | _aMicromechanics | ||
| 650 | _aOhmic contacts | ||
| 650 | _aPower semiconductors | ||
| 650 | _aSemiconductors | ||
| 650 | _aSemiconductors--Junctions | ||
| 650 | _aSilicon compounds | ||
| 856 |
_uhttp://10.10.170.122:8080/browse/book/22406 _yeBook |
||
| 942 |
_cBK _2ddc |
||