| 000 | 00561nam a2200181 a 4500 | ||
|---|---|---|---|
| 999 |
_c5138 _d5138 |
||
| 020 | _a0195136055 (hardcover) | ||
| 020 | _a9780195136050 (hardcover) | ||
| 100 | 1 | _aCampbell, Stephen A. | |
| 245 | 1 | 4 | _aThe Science and Engineering of Microelectronic Fabrication |
| 250 | _a2nd ed. | ||
| 260 |
_a[S.l.] : _bOxford University Press, _c2001. |
||
| 300 | _a624 p. ; | ||
| 650 | _aSemiconductors--Design and construction | ||
| 650 | _aMicroelectronics | ||
| 650 | _aComputer engineering | ||
| 856 | 4 | 0 | _uhttp://10.10.170.122:8080/browse/book/24368 |
| 942 | _cBK | ||