| 000 | 00697nam a2200217 a 4500 | ||
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_c10120 _d10120 |
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| 003 | PK-NaQUE | ||
| 005 | 20260309091110.0 | ||
| 008 | 260309b ||||| |||| 00| 0 eng d | ||
| 020 | _a0070193045 (hardcover) | ||
| 020 | _a9780070193048 (hardcover) | ||
| 040 | _cQUEST | ||
| 100 | 1 | _aElliott, David J. | |
| 245 | 1 | 0 | _aMicrolithography : process technology for Ic fabrication |
| 260 |
_a[S.l.] : _bMcgraw-Hill (Tx), _c1986. |
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| 300 | _a378 p. ; | ||
| 650 | _aIntegrated circuits--Very large scale integration--Design and construction | ||
| 650 | _aMicrolithography | ||
| 650 | _aPhotoresists | ||
| 856 | 4 | 0 |
_uhttp://10.10.170.122:8080/browse/book/29373 _yDownload eBook |
| 942 |
_cBK _2ddc |
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