TY  - BOOK
AU  - May,Gary S.
AU  - Sze,Simon M.
TI  - Fundamentals of Semiconductor Fabrication
SN  - 981253072X (paperback)
U1  - 621.38152MAY 
PY  - 2004///
CY  - [S.l.]
PB  - Wiley
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits Design and construction
UR  - http://10.10.170.122:8080/browse/book/26281
ER  -