@book{68989,
	author = {Madou, Marc J.},
	title = {Fundamentals of Microfabrication and Nanotechnology: Vol 1 solid-state physics, fluidics, and analytical techniques in micro-and nanotechnology},
	publisher = {CRC,},
	year = {2012.},
	address = {London:},
	edition = {3rd edition},
	url = {http://10.10.170.122:8080/browse/book/28926}
}