00493nam a22001697a 4500999001700000020001800017100001900035245009800054250001600152260002500168300001200193650003500205650003400240650001800274650002400292942000700316  c68988d68985  a9781420055141  aMadou, Marc J.  aFundamentals of Microfabrication and Nanotechnology: Vol 3 from Mems to bio-mems and bio-mems  a3rd edition  aLondon:bCRC,c2012.  a654p. ;  aMicroelectromechanical systems  aNanoelectromechanical systems  aMicrofluidics  aSolid state physics  cBK