TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of Microfabrication and Nanotechnology: Vol 3 from Mems to bio-mems and bio-mems
SN  - 9781420055141
PY  - 2012///
CY  - London
PB  - CRC
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
KW  - Microfluidics
KW  - Solid state physics
ER  -