00445nam a22001457a 4500020001800000100001900018245009800037250001600135260002500151300001200176650003500188650003400223650001800257650002400275  a9781420055141  aMadou, Marc J.  aFundamentals of Microfabrication and Nanotechnology: Vol 3 from Mems to bio-mems and bio-mems  a3rd edition  aLondon:bCRC,c2012.  a654p. ;  aMicroelectromechanical systems  aNanoelectromechanical systems  aMicrofluidics  aSolid state physics