TY  - BOOK
AU  - Madou, Marc J. 
TI  - Fundamentals of Microfabrication and Nanotechnology: Vol 2 manufacturing techniques for microfabrication and nanotechnology
SN  - 9781420055141
U1  - 670MAD 
PY  - 2012///
CY  - London
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
KW  - Microfluidics
KW  - Solid state physics
UR  - http://10.10.170.122:8080/browse/book/28925
ER  -