Fundamentals of Microfabrication and Nanotechnology: Vol 2 manufacturing techniques for microfabrication and nanotechnology
Madou, Marc J.
creator
text
London
CRC Press
2012
3rd ed.
monographic
eng
656p. ;
Microelectromechanical systems
Nanoelectromechanical systems
Microfluidics
Solid state physics
670MAD
9781420055141
http://10.10.170.122:8080/browse/book/28925
http://10.10.170.122:8080/browse/book/28925
251120
20251120113315.0