@book{68987,
	author = {Madou, Marc J. },
	title = {Fundamentals of Microfabrication and Nanotechnology: Vol 2 manufacturing techniques for microfabrication and nanotechnology},
	publisher = {CRC Press,},
	year = {2012.},
	address = {London:},
	edition = {3rd ed.},
	url = {http://10.10.170.122:8080/browse/book/28925}
}