TY  - BOOK
AU  - Zetterling, Carl-Mikael
TI  - Process Technology for Silicon Carbide Devices 
SN  - 0852969988
U1  - 621.3815MIK 
PY  - 2002///
CY  - London
PB  - INSPEC
KW  - Silicon carbide--Electric properties	
KW  - Carbides	
KW  - Micromechanics	
KW  - Ohmic contacts	
KW  - Power semiconductors	
KW  - Semiconductors	
KW  - Semiconductors--Junctions	
KW  - Silicon compounds	
UR  - http://10.10.170.122:8080/browse/book/22406
ER  -