TY  - BOOK
AU  - Campbell,Stephen A.
TI  - The Science and Engineering of Microelectronic Fabrication
SN  - 0195136055 (hardcover)
PY  - 2001///
CY  - [S.l.]
PB  - Oxford University Press
KW  - Semiconductors--Design and construction	
KW  - Microelectronics	
KW  - Computer engineering	
UR  - http://10.10.170.122:8080/browse/book/24368
ER  -