@book{5138,
	author = {Campbell, Stephen A.},
	title = {The Science and Engineering of Microelectronic Fabrication},
	publisher = {Oxford University Press,},
	year = {2001.},
	address = {[S.l.] :},
	edition = {2nd ed.},
	url = {http://10.10.170.122:8080/browse/book/24368}
}