TY - BOOK AU - Liu,Ai-Qun TI - RF MEMS, Switches and Integrated Switching Circuits T2 - Mems reference shelf SN - 0387462619 (hardcover) PY - 2010/// CY - [S.l.] PB - Springer KW - Radio Frequency Microelectromechanical Systems KW - Mechanical Engineering KW - Systems Engineering KW - Electronics UR - http://10.10.170.122:8080/browse/book/25202 ER -