TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of Microfabrication and Nanotechnology: Vol 3 from memes to bio-memes and bio-memes
SN  - 9781420055115
U1  - 670MAD 
PY  - 2012///
CY  - New York
PB  - CRC press
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
KW  - Microfluidics
KW  - Solid state physics
UR  - http://10.10.170.122:8080/browse/book/28927
ER  -