00722nam a22002417a 4500 12240 12240 PK-NaQUE 20251120113908.0 251120b ||||| |||| 00| 0 eng d 9781420055115 QUEST 670MAD Madou, Marc J. Fundamentals of Microfabrication and Nanotechnology: Vol 3 from memes to bio-memes and bio-memes Vol:III New York CRC press 2012 636 Microelectromechanical systems Nanoelectromechanical systems Microfluidics Solid state physics http://10.10.170.122:8080/browse/book/28927 Download eBook BK ddc 0 0 0 0 QUESTCL QUESTCL 2015-02-03 10499.00 1 670MAD 46216 2023-04-01 2023-03-02 00:00:00 2023-03-02 2015-02-03 BK