@book{12240,
	author = {Madou, Marc J.},
	title = {Fundamentals of Microfabrication and Nanotechnology: Vol 3 from memes to bio-memes and bio-memes},
	publisher = {CRC press},
	year = {2012},
	address = {New York},
	edition = {Vol:III},
	url = {http://10.10.170.122:8080/browse/book/28927}
}