TY  - BOOK
AU  - Elliott,David J.
TI  - Microlithography : process technology for Ic fabrication
SN  - 0070193045 (hardcover)
PY  - 1986///
CY  - [S.l.]
PB  - Mcgraw-Hill (Tx)
KW  - Integrated circuits--Very large scale integration--Design and construction
KW  - Microlithography
KW  - Photoresists
UR  - http://10.10.170.122:8080/browse/book/29373
ER  -