@book{10120,
	author = {Elliott, David J.},
	title = {Microlithography : process technology for Ic fabrication},
	publisher = {Mcgraw-Hill (Tx),},
	year = {1986.},
	address = {[S.l.] :},
	url = {http://10.10.170.122:8080/browse/book/29373}
}